Mid-Infrared Gas Classification Using a Bound State in the Continuum Metasurface and Machine Learning

Abstract

Mid-infrared (mid-IR) spectroscopy enables nondestructive and real-time chemical identification. Emerging demand for in situ sensing has motivated the development of novel sensing technologies that minimize size, weight, power, and cost. These technologies include mid-IR microspectrometers that interface a detector array with an array of discrete spectral filters. This specific approach is compatible with many different filter technologies that provide distinct tradeoffs in spectral selectivity, fabricability, and optical efficiency. A family of all-dielectric, single-layer, coupled waveguide-grating structures excels in all these aspects but has not yet been considered. These filters permit..